Zobrazeno 1 - 10 of 29 pro vyhledávání: '"E J Boyd"'
1
Measurement of the temperature coefficient of Young's modulus of single crystal silicon and 3C silicon carbide below 273 K using micro-cantilevers
Autor: E. J. Boyd, Li Li, Deepak Uttamchandani, Robert Blue
Publikováno v: Sensors and Actuators A: Physical. 198:75-80
This paper reports on the measurement of the thermal coefficient of Young's modulus of both single crystal silicon and 3C silicon carbide over the temperature range spanning 200-290 K. The thermal coefficients were determined by monitoring the change
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e8f6b101725ed272605a501043f4cfbf
https://doi.org/10.1016/j.sna.2013.04.032
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2
Measurement of the Anisotropy of Young's Modulus in Single-Crystal Silicon
Autor: E. J. Boyd, Deepak Uttamchandani
Publikováno v: Journal of Microelectromechanical Systems. 21:243-249
In (100) silicon wafers, the most commonly used in microelectromechanical systems (MEMS) fabrication, the value of Young's modulus of a MEMS structure can vary by over 20%, depending on the structure's orientation on the wafer surface. This anisotrop
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8912cb0dccd4011e4e55269ee4c037a2
https://doi.org/10.1109/jmems.2011.2174415
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3
Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers
Autor: Volker Nock, Xudong Li, Deepak Uttamchandani, E. J. Boyd, D. Weiland
Publikováno v: Sensors and Actuators A: Physical. 172:440-446
As microelectromechanical systems (MEMS) become more complex and is produced in even greater numbers it becomes increasingly important to have a full understanding of the mechanical properties of the commonly used MEMS materials. One of the most impo
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5fa48752a63be5933ab6668c61f16e11
https://doi.org/10.1016/j.sna.2011.09.022
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4
Density measurement of thin-films for micro-electromechanical systems using micro-cantilever structures
Autor: Volker Nock, E. J. Boyd, X. Li, Deepak Uttamchandani
Publikováno v: Thin Solid Films. 519:7932-7935
The use of micro-cantilever test structures for determining the density of thin film materials is reported. A range of micro-cantilever test structures has been fabricated using silicon, silicon nitride and silicon carbide which are materials that ar
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d70d594417d42b17af827afabb5d99e3
https://doi.org/10.1016/j.tsf.2011.07.017
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5
A simple technique to determine the anisotropy of Young's modulus of single crystal silicon using coupled micro-cantilevers
Autor: E. J. Boyd, Deepak Uttamchandani, Ian Armstrong, Bhaskar Choubey
Publikováno v: 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
This paper reports on a simple technique to measure the anisotropy of the Young's modulus of single crystal silicon using a coupled cantilever structure fabricated in the silicon. We demonstrate that it is possible to determine the Young's modulus of
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8407ee54f39297ea7957607bc44b412b
https://doi.org/10.1109/memsys.2012.6170171
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6
Determination of the anisotropy of young's modulus using a coupled microcantilever array
Autor: Ian Armstrong, E. J. Boyd, Deepak Uttamchandani, Bhaskar Choubey
Publikováno v: Journal of Microelectromechanical Systems. 21(5)
This paper reports a simple technique to measure the anisotropy of the Young's modulus of MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal silicon with an array of cantilevers fabricated in (100) silicon follo
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::208995975b26d9e3300fe35c0bfed8e0
http://ora.ox.ac.uk/objects/uuid:327f29e5-14c5-4115-a596-ae09a58f205e
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9
The prevalence of esophagitis in patients with duodenal ulcer or ulcer-like dyspepsia
Autor: E J, Boyd
Publikováno v: The American journal of gastroenterology. 91(8)
It has been reported that 30-72% of patients with duodenal ulcer disease also have esophagitis. However, many of these reports included patients who had severe or complicated ulcer disease, so that the high prevalence may reflect pyloric stenosis or
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=pmid________::3a93bc85f1bf962a12f794c17bb14108
https://pubmed.ncbi.nlm.nih.gov/8759657
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