Zobrazeno 1 - 10 of 16 pro vyhledávání: '"E A Minzhulina"'
1
Studying heating of magnetron target based on measurement of substrate temperature
Autor: E A Minzhulina, V. I. Shapovalov
Publikováno v: Vacuum. 161:324-327
The present work aims to develop the method for indirect determination of the magnetron target temperature. This method is based on the measurements of heating kinetic curves of the thermocouple sensor's sensing element. The measurements were perform
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::333b45fe82b92fedc89471912329f408
https://doi.org/10.1016/j.vacuum.2019.01.001
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2
Influence of argon pressure and current density on substrate temperature during magnetron sputtering of hot titanium target
Autor: E A Minzhulina, V. I. Shapovalov, A. A. Komlev, Vladislav V. Smirnov
Publikováno v: Applied Physics A. 124
The paper describes physical characteristics of the hot target sputtering process, which have not been known before. To switch a magnetron over to the hot target regime, a titanium disk of 1 mm thick with a 1-mm-gap was attached on a 4-mm-thick coppe
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::cd556e98ac593c01840c06c539a0c508
https://doi.org/10.1007/s00339-017-1458-4
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3
I-V characteristics of magnetron with hot titanium target sputtered in argon-oxygen mixture
Autor: D. S. Shestakov, E. A. Minzhulina, N. Aslan, V. I. Shapovalov
Publikováno v: Journal of Physics: Conference Series. 1313:012042
The discharge current-voltage characteristics of a dc magnetron with a single hot titanium target in Ar + O2 environment are studied. It was found that the I-V characteristics measured in the range of current densities of 10-200 mA/cm2 have three inf
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5011a5ee95261d453bdd828e7384a59d
https://doi.org/10.1088/1742-6596/1313/1/012042
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5
Reactive magnetron sputtering of hot titanium target in mixture of argon and nitrogen
Autor: E. A. Minzhulina, D. S. Shestakov, V. I. Shapovalov, A. V. Kochin
Publikováno v: Journal of Physics: Conference Series. 1281:012071
The influence of nitrogen flow rate on the discharge I-V characteristics of a dc magnetron with a single hot titanium target is studied. The basic processes forming the discharge are determined. The discharge physical models are proposed.
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::aee3e1cd6070f689e7861526fb5f07ad
https://doi.org/10.1088/1742-6596/1281/1/012071
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7
Modeling of reactive sputtering of hot titanium target in nitrogen and oxygen
Autor: V I Shapovalov, E A Minzhulina, A O Goncharov
Publikováno v: IOP Conference Series: Materials Science and Engineering. 387:012020
A model for reactive sputtering of a hot titanium target in the environment of oxygen and nitrogen is considered. The target temperature is defined as a function of the ion current density. For the mathematical description of the process, the basic p
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::882a72a903a3374eb13c636645adf4a5
https://doi.org/10.1088/1757-899x/387/1/012020
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10
Akademický článek
I-V characteristics of magnetron with hot titanium target sputtered in argon-oxygen mixture.
Autor: E A Minzhulina, V I Shapovalov, N Aslan, D S Shestakov
Publikováno v: Journal of Physics: Conference Series; 2019, Vol. 1313 Issue 1, p1-1, 1p
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