Výsledky vyhledávání - "Durr, Arndt"

Conference

Application results at 193nm: lithography emulation by aerial imaging and supplementary high resolution measurements.

Autor: Zibold, Axel M., Schmid, Rainer, Bohm, Klaus, Brunner, Robert, Durr, Arndt C.

Publikováno v: Proceedings of SPIE; Nov2005, Issue 1, p115-121, 7p

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Conference

Defect printability and inspectability of halftone masks for the 90nm and 70nm node.

Autor: Eggers, Karin, Gutjahr, Karsten, Peikert, Milko, Rutzinger, Dieter, Ludwig, Ralf, Kaiser, Michael, Durr, Arndt, Heumann, Jan

Publikováno v: Proceedings of SPIE; Nov2005, Issue 1, p273-281, 9p

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Conference

Aerial image based mask defect detection in dense array structures.

Autor: Kohle, Roderick, Hennig, Mario, Pforr, Rainer, Bubke, Karsten, Sczyrba, Martin, Durr, Arndt C.

Publikováno v: Proceedings of SPIE; Nov2005, Issue 1, p953-964, 12p

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Growth and structure of DIP thin films and Au contacts on DIP thin films

Autor: Dürr, Arndt Christian.

Stuttgart, University, Diss., 2002 (Nicht für den Austausch).

Externí odkaz: http://www.bsz-bw.de/cgi-bin/xvms.cgi?SWB10157290

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Electronic Resource

Growth and structure of DIP thin films and Au contacts on DIP thin films

Autor: Dürr, Arndt Christian.

University, Diss., 2002--Stuttgart.

Externí odkaz: http://elib.uni-stuttgart.de/opus/volltexte/2002/1215/pdf/Diss_final_UBib.pdf
http://elib.uni-stuttgart.de/opus/volltexte/2002/1215/index.html
http://deposit.d-nb.de/cgi-bin/dokserv?idn=965580725

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