Výsledky vyhledávání - "Dundulachi, Alessandro"

Conference

Characterization of metal line--width variation in via first dual damascene approach and its modeling using machine learning artificial neural network algorithms.

Autor: Cantù, Pietro, Catarisano, Chiara, Corneo, Nicoletta, Dundulachi, Alessandro, Litterio, Emma, Mantovani, Valeria, Patelmo, Matteo, Triulzi, Benedetta

Publikováno v: Proceedings of SPIE; 1/16/2018, Vol. 10588, p1-11, 11p

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Periodical

Characterization of metal line-width variation in via first dual-damascene approach and its modeling using machine learning artificial neural network algorithms

Autor: Cain, Jason P., Yuan, Chi-Min, Cantù, Pietro, Catarisano, Chiara, Corneo, Nicoletta, Dundulachi, Alessandro, Litterio, Emma, Mantovani, Valeria, Patelmo, Matteo, Triulzi, Benedetta

Publikováno v: Proceedings of SPIE; March 2018, Vol. 10588 Issue: 1 p105880S-105880S-11, 10482132p

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