Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Duk Ho Hong"'
Autor:
Insoo Cho, Ja Hyung Han, Seong-Il Kim, Ja Eung Koo, Byung Lyul Park, Jin-Goo Park, Ahmed Busnaina, Dae Hong Eom, Duk Ho Hong
Publikováno v:
Solid State Phenomena. :369-372
Corrosion on specific Cu patterns was evaluated during Cu CMP. The corrosion was observed at isolated patterns and outer edge area of pad surrounded by oxide field after polishing and showed dependency on process. Two different commercial slurries we
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b74a90db8122b975c713b0fc0bb9a7ca
https://doi.org/10.4028/www.scientific.net/ssp.103-104.369
https://doi.org/10.4028/www.scientific.net/ssp.103-104.369
Autor:
Wei-Tsu Tseng, Akihisa Sakamoto, Shom Ponoth, Duk Ho Hong, Laertis Economikos, Stephen Vogt, Adam Ticknor, Stephan Cohen, Robin Wanner, Ben Kim
Publikováno v:
ECS Meeting Abstracts. :397-397
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::843c8af311666e784edc28a1af7074be
https://doi.org/10.1149/ma2006-01/9/397
https://doi.org/10.1149/ma2006-01/9/397