A study of interface states of directly bonded silicon-on-insulator (SOI) structures.

Autor: Buldygin, S.A., Bulycheva, T.V., Golod, S.V., Drofa, A.T., Kamaev, G.N., Skok, E.M.

Publikováno v: 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings APEIE-98 (Cat No98EX179); 1998, p49-53, 5p