High resolution TEM analysis of focused ion beam amorphized regions in single crystal silicon-A complementary materials analysis of the teardrop method.

Autor: Dreznera, Yariv, Greenzweig, Yuval, Tan, Shida, Livengood, Richard H., Raveh, Amir

Publikováno v: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan/Feb2017, Vol. 35 Issue 1, p1-10, 10p