Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Drew Barnes"'
Autor:
Lauren G. Fox, Drew Barnes
Publikováno v:
Psychiatric services (Washington, D.C.). 67(1)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2ef6c091c8cd4ccf6d587755ba4fe5f6
https://pubmed.ncbi.nlm.nih.gov/26725495
https://pubmed.ncbi.nlm.nih.gov/26725495
Publikováno v:
SPIE Proceedings.
We present the results of a DARPA sponsored study on the application of Focused Ion Beam (FIB) systems to metrology in advanced lithography for production and process development. Data on top-down measurements, on the effects of FIB imaging, and on m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::616660589042f3c75f41688818a6363a
https://doi.org/10.1117/12.386504
https://doi.org/10.1117/12.386504
Autor:
Drew Barnes, Kathryn Noll, Gregory J. Athas, J. David Casey, Don E. Yansen, Neil J. Bassom, Jesse A. Salen
Publikováno v:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V.
We demonstrate an approach to cross-section and measure sub- 0.25 micrometer photoresist profiles in both a manual and an automated fashion. This approach includes the use of a focused ion beam (FIB) system to cut small trenches through photoresist l
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59507c22d18db1067373d38da41b2592
https://doi.org/10.1117/12.361311
https://doi.org/10.1117/12.361311
Publikováno v:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV.
We present the ability of a focused ion beam system (FIB) to perform as an effective metrology tool. This feature is a benefit in areas where FIB technology is or can be used, or where pre-measurement cross-sectioning is required, such as the case in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd179c8e27d5b236bef9f0552e6f8d0f
https://doi.org/10.1117/12.324349
https://doi.org/10.1117/12.324349
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Conference
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