A broadband ellipsometer/polarimeter system

Autor: Garcia-Caurel, Enric, de Martino, Antonello, Drévillon, Bernard

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______166::42794bab4992dc345c9a1ad56d1ae0be
https://hal.archives-ouvertes.fr/hal-00458701

Deposition of silicon alloys in an integrated distributed electron cyclotron resonance reactor: oxide, nitride, oxinitrides and multilayers structures

Autor: Bulkin, Pavel, Hofrichter, A., Heitz, T., Huc, J., Drévillon, Bernard, Benattar, J.J.

Publikováno v: Journal of Vacuum Science and Technology A
Journal of Vacuum Science and Technology A, American Vacuum Society, 2002, pp.338
Journal of Vacuum Science & Technology A
Journal of Vacuum Science & Technology A, 2002, pp.338

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::5b76f6f002abfad77a94f2cd52e2b9a0
https://hal.science/hal-00914166

Ellipsometric method for real time control of thin deposition on imperfect substrates

Autor: Hofrichter, A., Heitz, T., Bulkin, Pavel, Drévillon, Bernard

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______166::4ec3c87f9e713651ab38f9b58d0e3f75
https://hal.archives-ouvertes.fr/hal-00914165

Low temperature plasma processed microcrystalline silicon thin films for large area electronics

Autor: Roca I Cabarrocas, P., Tripathi, V., Bulkin, Pavel, Brenot, Romain, Drévillon, Bernard, Vanderhagen, R., French, Ian

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______166::db799909aef9e74fce1b5d7369066493
https://hal.archives-ouvertes.fr/hal-00914169

A study of the influence of a hydrogenated carbon interlayer on the adhesion properties of plasma deposited silica thin films on polycarbonate

Autor: Hofrichter, A., Bulkin, Pavel, Ballutaud, Dominique, Drévillon, Bernard

Publikováno v: Le Vide
Le Vide, Société française du vide, 2000, pp.35

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::21a7eb4a74f969d155548d3e79fae433
https://hal.archives-ouvertes.fr/hal-00915354