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Publikováno v:
Journal of Photopolymer Science and Technology. 21:451-455
The density, absorbance, and outgassing of underlayer films and the effect of EUV irradiation on such films were evaluated. The relationship between density and calculated EUV absorbance was determined. Films having lower film density have lower EUV
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf0e3f4d9803967b0e16afa3a4df8b46
https://doi.org/10.2494/photopolymer.21.451
https://doi.org/10.2494/photopolymer.21.451
