Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Douglas Ray Sparks"'
Publikováno v:
Sensors and Actuators A: Physical. 171:159-162
A new MEMS-based density and binary gas concentration sensor is discussed. The micromachined sensor is made using a resonating silicon tube. Gas density and concentration test data over pressure for air, hydrogen, nitrogen, argon, methane, carbon dio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8aa95ab415ec010d79fd2a0beacb46c0
https://doi.org/10.1016/j.sna.2011.08.011
https://doi.org/10.1016/j.sna.2011.08.011
Publikováno v:
IEEE Transactions on Industrial Electronics. 56:1066-1071
A microfluidic Coriolis mass flow sensor is discussed. The micromachined flow sensors are made using silicon tubes bonded onto a metallized glass substrate. True mass flow rates with an accuracy of better than plusmn0.5% were measured between 1 and 5
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c4b7f45e3f5864b91b398d8fc198f6c
https://doi.org/10.1109/tie.2008.926703
https://doi.org/10.1109/tie.2008.926703
Publikováno v:
Sensors and Actuators A: Physical. 149:38-41
This paper examines the use of a micromachined resonating tube to measure both the dynamic viscosity and density of a fluid enabling the calculation of the kinematic viscosity. Dynamic viscosity is measured using the damping effect that a fluid has o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0c53e70b4f3b9338248def9346a4d35c
https://doi.org/10.1016/j.sna.2008.09.013
https://doi.org/10.1016/j.sna.2008.09.013
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1560-1564
The reliability of bonding silicon to Pyrex wafers using a reflowed glass frit seal is examined in this paper. The Pyrex wafers have metal feedthroughs, which are used to actuate and capacitively sense a single-crystal, silicon resonator. Long-term,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3123b7e0cddd1834ef6373f1fdc3aa53
https://doi.org/10.1088/0960-1317/15/8/026
https://doi.org/10.1088/0960-1317/15/8/026
Autor:
Douglas Ray Sparks, Timothy Hubbard
Publikováno v:
Journal of Micromechanics and Microengineering. 14:1230-1233
A new method of micromachining hollow needles and two-dimensional needle arrays from single crystal silicon is described. The process involves a combination of fusion bonding, photolithography and anisotropic plasma etching. The cannula produced with
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::20fd6725aae049e000c67d8e25f7fc9b
https://doi.org/10.1088/0960-1317/14/8/016
https://doi.org/10.1088/0960-1317/14/8/016
Autor:
S. Massoud-Ansari, R. Schneider, Douglas Ray Sparks, J. Cripe, N. Najafi, A. Chimbayo, Richard Thayre Smith
Publikováno v:
Sensors and Actuators A: Physical. 107:119-124
A new microfluidic system for measuring the density and specific gravity of a fluid has been developed. Measurements can be made with under a microliter of sample fluid. The syringe loaded system includes a dynamic temperature control system employin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::53ab53dce619d705f706b90c67774559
https://doi.org/10.1016/s0924-4247(03)00350-9
https://doi.org/10.1016/s0924-4247(03)00350-9
Autor:
G Woodward, Michael W. Putty, R Weston, S Zarabadi, Douglas Ray Sparks, K Jayakar, L Jordan, G Queen
Publikováno v:
Journal of Micromechanics and Microengineering. 11:630-634
The fabrication and reliability of a solder wafer-to-wafer bonding process is discussed. Using a solder reflow process allows vacuum packaging to be accomplished with unplanarized complementary metal-oxide semiconductor (CMOS) surface topography. Thi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb8d9250e536a9be550d42c7644e0535
https://doi.org/10.1088/0960-1317/11/6/303
https://doi.org/10.1088/0960-1317/11/6/303
Autor:
Douglas Ray Sparks
Micromachined pressure and flow sensors for automotive and aerospace applications are covered in this chapter. MEMS design, fabrication and packaging are explored for these applications. Both new and developing MEMS sensors for high temperature, high
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff4a1b519d1f784087dee7f67590571b
https://doi.org/10.1533/9780857096487.1.78
https://doi.org/10.1533/9780857096487.1.78
Autor:
Douglas Ray Sparks, M. Yasuda, A. Chimbayo, V. Cruz, K. Kawaguchi, D. Riley, N. Najafi, N. Tran
Publikováno v:
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
A MEMS-based methanol concentration sensor for monitoring and controlling the methanol to water ratio in a DMFC system is described. This sensor is based on a microfluidic chip that employs a resonant microtube and on-chip platinum temperature sensor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::29f2487b01279c326ddcb8297fecf487
https://doi.org/10.1109/sensor.2007.4300532
https://doi.org/10.1109/sensor.2007.4300532
Publikováno v:
Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology.
The package design for microfluidic sensors is discussed. The MicroElectroMechanical Systems (MEMS) device covered in this paper requires a fluidic and electrical interface as well as vacuum packaging of the sensing element. By using a by-pass packag
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e04803c0966717c3580030c9dccb392f
https://doi.org/10.1115/imece2006-13104
https://doi.org/10.1115/imece2006-13104