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pro vyhledávání: '"Douglas Gehringer"'
Autor:
Kannan Sekar, Neerja Bawaskar, Huaxing Tang, Matt Knowles, Gaurav Veda, Wu-Tung Cheng, Manish Sharma, Douglas Gehringer, Yan Pan, Jayant D'Souza
Publikováno v:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Device complexity is reaching all-time highs with the adoption of high aspect ratio FinFETs created using multi- patterning process technologies. Simultaneously, new product segments such as AI and automotive are being fabricated on such advanced pro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6566065d33d4f4b072074d619b936e6b
https://doi.org/10.1109/asmc.2019.8791755
https://doi.org/10.1109/asmc.2019.8791755
