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Autor:
Michael P. Belyansky, Doug H. Lee, Ming Cai, Stephan Waidmann, Brian J. Greene, Karthik Ramani, Frank D. Tamweber, William K. Henson
Publikováno v:
IEEE Transactions on Electron Devices. 57:1706-1709
Strain effects from stress liners on silicon-on-insulator MOSFETs with high-k dielectric and metal gate (HKMG) are reported. By thoroughly evaluating their impact on drive current, mobility, and threshold voltage, the intrinsic performance gain of st