Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Dorrance E. McLean"'
Autor:
D. M. Skala, Stewart K. Griffiths, Nancy Y. C. Yang, Georg Aigeldinger, L L Hunter, Dale R. Boehme, John T. Hachman, Thomas A. Friedmann, Cheryl A. Hauck, P C Y Yang, J S Korellis, Dorrance E. McLean, Matthew W. Losey, Michelle A. Hekmaty, Wei-Yang Lu, James J. Kelly
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1700-1712
Resist substrates used in the LIGA process must provide high initial bond strength between the substrate and resist, little degradation of the bond strength during x-ray exposure, acceptable undercut rates during development and a surface enabling go
Autor:
Chu-Yeu Peter Yang, Wei-Yang Lu, Georg Aigeldinger, Cheryl A. Hauck, John T. Hachman, Michelle A. Hekmaty, James J. Kelly, D. M. Skala, John S. Korellis, Thomas A. Friedmann, Dorrance E. McLean, Luke L. Hunter, Matthew W. Losey, Stewart K. Griffiths, Nancy Y. C. Yang, Dale R. Boehme
Resist substrates used in the LIGA process must provide high initial bond strength between the substrate and resist, little degradation of the bond strength during x-ray exposure, acceptable undercut rates during development, and a surface enabling g
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::16ad662c53387182b8df20236c5aa20a
https://doi.org/10.2172/923166
https://doi.org/10.2172/923166
Autor:
Cheryl A. Hauck, Karen Lee Krafcik, Georg Aigeldinger, Alfredo M. Morales, Linda A. Domeier, Patrick N. Keifer, Peter C. Yang, John T. Hachman, Michelle A. Bankert, Dorrance E. McLean
Publikováno v:
SPIE Proceedings.
The use of silver filled PMMA as a sacrificial layer for the fabrication of multilevel LIGA microparts is presented. In this technique, a bottom level of standard electroformed LIGA parts is first produced on a metallized substrate such as a silicon
Microstructure and mechanical properties of nickel microparts electroformed in replicated LIGA molds
Autor:
John T. Hachman, Steven H. Goods, Alfredo M. Morales, Marcela Gonzales, Linda A. Domeier, Andrew D. Gardea, Jill M. Hruby, Dorrance E. McLean, Nancy Y. C. Yang
Publikováno v:
SPIE Proceedings.
A novel process for the rapid replication of electroforming plastic micromolds has been developed and is now being used to produce plated nickel test specimens. The process combines hot embossing or injection molding with metallic microscreens to pro