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pro vyhledávání: '"Doo Hyong Lee"'
Publikováno v:
Journal of Nanoscience and Nanotechnology. 11:4312-4316
Recently, nanostructured zinc oxide (ZnO) for many different applications in micro- and opto-electronic devices has been studied intensively. However, its structural and electrical properties still require improvements for ZnO-based transparent elect
Autor:
Bo-Hyun Chung, Kie-Hyung Chung, Jin-Seok Hong, Seung Jeong Noh, Doo Hyong Lee, Seung-Kook Ko, Jae-Ha Jeon
Publikováno v:
Journal of the Korean Physical Society. 52:761-765
Publikováno v:
Journal of nanoscience and nanotechnology. 11(1)
Nitrogen-doped ZnO (ZnO:N) films were successfully grown on glass substrates by atomic layer deposition (ALD). NH3 was used as a doping source, and the substrate temperature was relatively low (90 approximately 210 degrees C). The main focus of the s