Zobrazeno 1 - 10
of 67
pro vyhledávání: '"Dongsuk D. Shin"'
Publikováno v:
Physical Review Research, Vol 3, Iss 3, p 033268 (2021)
Micromechanical oscillators provide periodic output signals for clocks and sensors by vibrating in a single mechanical mode. The mode is conventionally excited into self-sustained oscillations and stabilized with an external electronic feedback loop.
Externí odkaz:
https://doaj.org/article/198ef22991a14a98ad6d402a29c6c3c3
Autor:
Zohreh Mohammadi, Toni L Heugel, James M L Miller, Dongsuk D Shin, Hyun-Keun Kwon, Thomas W Kenny, Ramasubramanian Chitra, Oded Zilberberg, Luis Guillermo Villanueva
Publikováno v:
New Journal of Physics, Vol 22, Iss 9, p 093049 (2020)
Resonant sensors based on micro- and nano-electro mechanical systems (M/NEMS) are ubiquitous in many sensing applications due to their outstanding performance capabilities, which are directly proportional to the quality factor ( Q ) of the devices. W
Externí odkaz:
https://doaj.org/article/82cb00b940224f279d9ddfee5fbfaae3
Autor:
Janna Glaze, Dustin D. Gerrard, Dongsuk D. Shin, Yunhan Chen, David B. Heinz, Gabrielle D. Vukasin, Thomas W. Kenny, Yusheng Wang, Yu-Wei Lin, Hyun-Keun Kwon, Andrei M. Shkel
Publikováno v:
Journal of Microelectromechanical Systems. 30:193-202
We present a study on the quantification of energy dissipation of Micro-Electro-Mechanical System (MEMS) resonators. Toroidal Ring Gyroscope (TRG) was used as a platform to conduct the study. The main energy dissipation mechanisms in TRG include visc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc62b363f6e957cfa9bea9953543bb8c
https://doi.org/10.1109/jmems.2020.3045985
https://doi.org/10.1109/jmems.2020.3045985
Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators
Autor:
Ian B. Flader, Anne L. Alter, Dongsuk D. Shin, Thomas W. Kenny, Lizmarie Comenencia Ortiz, Yunhan Chen
Publikováno v:
Journal of Microelectromechanical Systems. 29:1483-1492
Fatigue in thick ( $> 20~\mu \text{m}$ ), epitaxially deposited polysilicon MEMS is characterized from 25°C and up to 250°C in an environment free of oxygen and humidity. This work is the first to report fatigue initiated in the native epi-polysili
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5130902e93ecadec6bb4d0fb141605a6
https://doi.org/10.1109/jmems.2020.3021947
https://doi.org/10.1109/jmems.2020.3021947
Autor:
Janna Glaze, David B. Heinz, Ernest Ting-Ta Yen, Veronica K. Sanchez, Nicholas E. Bousse, Gabrielle D. Vukasin, Dongsuk D. Shin, Hyun-Keun Kwon, Nathan Bissel, Thomas W. Kenny
Publikováno v:
Journal of Microelectromechanical Systems. 29:860-866
We present a Lame mode resonator whose limiting damping mechanism depends on its anchor geometry. The device is anchor-limited when the anchors are stiffer and is Akhiezer-limited with more compliant anchors. This result is determined by observing th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0c145aba8e598fb8dce612950248919f
https://doi.org/10.1109/jmems.2020.3012925
https://doi.org/10.1109/jmems.2020.3012925
Autor:
James M. L. Miller, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, Haoshen Zhu, Thomas W. Kenny, Subramanian Sundaram, Gabrielle D. Vukasin
Publikováno v:
Journal of Microelectromechanical Systems. 29:677-684
We study thermal-piezoresistive cooling in silicon micromechanical resonators at large currents and high temperatures. Crossing a thermal transition region corresponds to a steep reduction in resonance frequency, an abrupt plateauing in the effective
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7aa9e3265c93215797fe27a3a81f1191
https://doi.org/10.1109/jmems.2020.3022050
https://doi.org/10.1109/jmems.2020.3022050
Autor:
Lizmarie Comenencia Ortiz, Yunhan Chen, Thomas W. Kenny, David B. Heinz, Dongsuk D. Shin, Gabrielle D. Vukasin, Janna Rodriguez, Hyun-Keun Kwon
Publikováno v:
Journal of Microelectromechanical Systems. 29:190-201
We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip device layer micro-oven that utilizes less than 30mW for resonator temperature control over variations in external temperature from −40°C to +60°C. The device layer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d88ec98b911fd06c4821beb0a559e2d2
https://doi.org/10.1109/jmems.2020.2970609
https://doi.org/10.1109/jmems.2020.2970609
Autor:
James M.L. Miller, Anne L. Alter, Nicholas E. Bousse, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Thomas W. Kenny, Steven W. Shaw
Publikováno v:
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::585b50904a4fefd28de5586ae3f9fe07
https://doi.org/10.1109/mems51670.2022.9699668
https://doi.org/10.1109/mems51670.2022.9699668
Publikováno v:
Physical Review Research. 3
Micromechanical oscillators provide periodic output signals for clocks and sensors by vibrating in a single mechanical mode. The mode is conventionally excited into self-sustained oscillations and stabilized with an external electronic feedback loop.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3a08e5cdc872e54ece3f6b62790d4961
https://doi.org/10.1103/physrevresearch.3.033268
https://doi.org/10.1103/physrevresearch.3.033268
Publikováno v:
Journal of Microelectromechanical Systems. 29:1118-1120
In this paper, we observe amplitude-dependent nonlinear dissipation in experimental measurements of the quality factor (Q). The ringdown response is used to quantify the magnitude of the amplitude-dependent effect in both polysilicon and single cryst
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::937e12a982264af712ac127d47cd1c8c
https://doi.org/10.1109/jmems.2020.3005323
https://doi.org/10.1109/jmems.2020.3005323