Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Dong Kyeng Han"'
Autor:
Machi Ryu, Chung-Yong Kim, Austin Peng, Jeong Heung Kong, Yun-A Sung, Se Yeon Jang, Ju Hee Shin, Khalid Elbattay, Noh-Kyoung Park, Zhao-Ze Li, Jin Phil Choi, Young Seog Kang, Tony Park, Peter Nikolsky, Chris Strolenberg, Jangho Shin, Andrew Moe, Anand Guntuka, Vito Tomasello, Ronald Goossens, Du Hyun Beak, Dong Kyeng Han
Publikováno v:
SPIE Proceedings.
Shrinking pattern sizes dictate that scanner-to-scanner variations for HVM products shrink proportionally. This paper shows the ability to identify (a subset of) root causes for mismatch between ArF immersion scanners using scanner metrology. The roo