Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Donald P. DeGloria"'
Publikováno v:
SPIE Proceedings.
Air turbulence affects the performance of the Helium-Neon interferometer used to control the wafer stage of stepper or step-and-scan lithography systems. In this paper, we describe characterization and reduction of the major error sources in an Air T
Autor:
Donald P. DeGloria, David E. B. Lees, Michael Michalik, Frank M. Pagliughi, Robert F. Dillon, Michael G. Cheifetz, Jeffrey T. Muller
Publikováno v:
SPIE Proceedings.
In this paper SPARTA reports on the design and field testing of a flexible low-cost diode-based ladar system. It serves as a data collection and research tool that can image extended targets to ranges exceeding 1.0 km and wirelike targets to ranges o
Autor:
Philip D. Henshaw, Donald P. DeGloria
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 14:3955
Air turbulence affects the performance of the helium‐neon interferometer used to control the wafer stage of stepper or step and scan lithography systems. In this article we describe the principles of operation and performance characterization of an
Conference
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