Zobrazeno 1 - 10
of 254
pro vyhledávání: '"Donald P. Butler"'
Publikováno v:
Sensors and Actuators A: Physical. 263:530-541
Surface micro-machined z-axis capacitive accelerometers were designed and fabricated on a flexible polyimide substrate, conformal down to 2 cm radius of curvature with the stresses sustained by all layers well below the yield strength for each materi
Publikováno v:
Infrared Physics & Technology. 79:50-57
Uncooled infrared detectors (IR) on a polyimide substrate have been demonstrated where amorphous silicon (a-Si) was used as the thermometer material. New concepts in uncooled microbolometers were implemented during the design and fabrication, such as
Publikováno v:
Nano Energy. 26:456-465
The design, fabrication, performance simulation and characterization of a piezoelectric zinc oxide (ZnO) nanowire (NW) micro-energy harvester integrated with a microelectromechanical proof-mass/spring system are presented. Low temperature hydrotherma
Autor:
Donald P. Butler, Moinuddin Ahmed
Publikováno v:
IEEE Sensors Journal. 15:6986-6994
Publikováno v:
Journal of Microelectromechanical Systems. 24:1400-1408
The fabrication and characterization of micromachined piezoresistive absolute pressure sensors in a flexible substrate is presented. A suspended aluminum oxide diaphragm containing nichrome (Ni-80%/Cr-20%) piezoresistive sensors backed by a vacuum ca
Autor:
Moinuddin Ahmed, Donald P. Butler
Publikováno v:
Infrared Physics & Technology. 71:1-9
Pyroelectric infrared detectors provide the advantage of both a wide spectral response and dynamic range, which also has enabled systems to be developed with reduced size, weight and power consumption. This paper demonstrates the deposition of lead z
Publikováno v:
IEEE Sensors Journal. 15:63-70
Flexible, bendable tactile pressure sensors are developed with crystalline ZnO nanorods as a robotic skin or as part of a multimodal sensing garment. The sensors are arranged in addressable arrays for detection of spatial tactile pressure variation w
Autor:
Donald P. Butler, Moinuddin Ahmed
Publikováno v:
Microsystem Technologies. 22:367-370
In the current paper, we report the 1/f noise measurement of nichrome Ni/Cr (80/20 %) thin films for two types of pressure sensors: relative pressure sensors and absolute pressure sensors. The normalized Hooge coefficient for nichrome thin film was f
Publikováno v:
Nano Energy. 10:71-82
A nanoelectromechanical vibrational energy harvester is reported based on a ZnO nanorod array coupled to a microelectromechanical mass-spring system. A carpet of vertically aligned crystalline zinc oxide nanorods grown using a low temperature process
Publikováno v:
2016 IEEE SENSORS.
A z-direction electret based Silicon-On-Insulator (SOI) electrostatic energy harvester (EH) that uses both out-of-plane overlap and out-of-plane gap closing capacitor is designed. A mathematical model of the system is developed and solved using MATLA