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pro vyhledávání: '"Don Dilworth"'
Publikováno v:
Advanced Optical Technologies. 6:31-38
This paper describes a method for designing an ultraviolet (UV) projection lens for microlithography. Our approach for meeting this objective is to use a starting design automatically obtained by the DSEARCH feature in the SYNOPSYS™ lens design pro
Autor:
Don Dilworth
Publikováno v:
Physics Today. 66:8-8