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Publikováno v:
Journal of Microelectromechanical Systems. 30:401-410
Parameter extraction during the final test of MEMS sensors poses a highly time-critical challenge. The progressing miniaturization, test stimuli and structural complexity lead to nonlinear couplings and inhomogeneity in system differential equations,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1038bc32bdef25ee23ba7f55648c2955
https://doi.org/10.1109/jmems.2021.3065975
https://doi.org/10.1109/jmems.2021.3065975
