Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Domenico Arancio"'
Publikováno v:
Procedia Engineering. 87:720-723
In this paper we present a high reliable, accurate and safe, solid state pressure sensor for high temperature applications. The sensor is based on an unique fluid-free technology using a piezoresistive SOI-based chip enclosed in a sealed metal housin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::687adbac9c4a16350cc0ceca88ed4cde
Autor:
Volker Dipl Phys Schlichting, Ernst Obermeier, Andrea Giuliani, Domenico Arancio, Biswaijit Mukhopadhyay, Klaus-Dieter Lang, Lionello Drera, Vu Cong Thanh, Peter Mackowiak, Ha-Duong Ngo
Publikováno v:
2012 IEEE Sensors.
In this paper a novel liquid-free, piezoresistive pressure sensor on SOI-basis (Silicon On Insulator) for high temperature applications is presented. The sensor is capable of measuring pressures at temperature up to 400 °C (constant load) with an ac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::778c8184d68254836ae912243d758c24
https://doi.org/10.1109/icsens.2012.6411031
https://doi.org/10.1109/icsens.2012.6411031