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pro vyhledávání: '"Dmytro Zelinskyi"'
Autor:
Liudmyla Mykolaivna Shmyrova, Dmytro Zelinskyi, Olha Kondratenko, Viacheslav Horokhov, Tetiana Viktorivna Semikina
Publikováno v:
Електронна та Акустична Інженерія : науково-технічний журнал, 2020, Т. 3, № 3
The series of three diamond-like carbon films was fabricated using Plasma – Enhanced Chemical Vapor Deposition setup designed for deposition of amorphous silicon films. The deposited films were analyzed by Spectroscopic ellipsometer Semilab SE-2000
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::428578b6fe01c61c921f4e1f1bfaffea
https://doi.org/10.20535/2617-0965.2020.3.3.199800
https://doi.org/10.20535/2617-0965.2020.3.3.199800
