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pro vyhledávání: '"Dmitry G. Ageychenkov"'
Autor:
Dmitry E. Burmistrov, Denis V. Yanykin, Mark O. Paskhin, Egor V. Nagaev, Alexey D. Efimov, Andrey V. Kaziev, Dmitry G. Ageychenkov, Sergey V. Gudkov
Publikováno v:
Materials, Vol 14, Iss 21, p 6586 (2021)
On the basis of a direct current magnetron, a technology has been developed for producing nanoscale-oriented nanorods from zinc oxide on an acrylic polymer. The technology makes it possible to achieve different filling of the surface with zinc oxide
Externí odkaz:
https://doaj.org/article/738e9e5f28f1439dbd9781a3fa9f4210
Publikováno v:
Plasma Sources Science and Technology.
Arrival of highly energetic (near 1000 eV) positive atomic oxygen ions to the substrate region has been detected in a unipolar reactive HiPIMS process operated with uncooled copper target in argon–oxygen mixtures. Examination of ion fluxes from dis