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pro vyhledávání: '"Dmitry Denk"'
Autor:
Vadim V. Cherkashin, Ruslan V. Shimansky, Victor P. Korolkov, Andrey A. Kharissov, Alexander G. Poleshchuk, Dmitry Denk
Publikováno v:
SPIE Proceedings.
The photolithography using gray-scale masks (GSM) with multilevel transmittance is now one of promising ways for manufacturing of high efficiency diffractive optical elements and microoptics. Such masks can be most effectively fabricated by laser or
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c96e634bb494b1c4937e32d8cabcfb87
https://doi.org/10.1117/12.448047
https://doi.org/10.1117/12.448047
