Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Dmitriy Yu. Terekhov"'
Publikováno v:
VESTNIK OF VORONEZH STATE AGRARIAN UNIVERSITY. 4:153-160
Investigation of Thermoelectric Properties for Ge2Sb2Te5 Thin Films Obtained by Magnetron Sputtering
Publikováno v:
2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus).
In this work, thermoelectric properties of Ge2Sb2Te5 thin films obtained by magnetron sputtering were investigated. Deposition was carried out at room temperature, the thickness of the films was 500 nm. The resistivity, Seebeck coefficient and therma