Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Divecha, Rajesh"'
Autor:
Divecha, Rajesh Ramji
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references (leaves 46-47).
by Rajesh Ramji Divecha.
M.Eng.
Includes bibliographical references (leaves 46-47).
by Rajesh Ramji Divecha.
M.Eng.
Externí odkaz:
http://hdl.handle.net/1721.1/43508
Autor:
Ouma, Dennis O., Stine, Brian, Divecha, Rajesh, Boning, Duane S., Chung, James E., Shinn, Gregory B., Ali, Iqbal, Clark, John
Publikováno v:
Proceedings of SPIE; Nov1997, Issue 1, p236-247, 12p
Autor:
Rotella, Francis, Bhattacharya, Bijan K., Blaschke, Volker, Matloubian, Mishel, Brotman, Andy, Yuhua Cheng, Divecha, Rajesh, Howard, David, Lampaert, Koen, Miliozzi, Paolo, Racanelli, Marco, Singh, Paramjit, Zampardi, Pete J.
Publikováno v:
IEEE Transactions on Electron Devices; Jul2005, Vol. 52 Issue 7, p1429-1441, 13p
Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing.
Autor:
Stine, Brian E., Ouma, Dennis O., Divecha, Rajesh R., Boning, Duane S., Chung, James E., Hetherington, Dale L., Harwood, C. Randy, Nakagawa, O. Samuel, Soo-Young Oh
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing; Feb98, Vol. 11 Issue 1, p129, 12p, 4 Black and White Photographs, 9 Diagrams, 2 Charts, 20 Graphs