Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Dirk Rondas"'
Autor:
Yosuke Kimura, Kurt Wostyn, Naoto Horiguchi, Hiroaki Arimura, Thierry Conard, Dirk Rondas, Lars-Ake Ragnarsson, Andriy Hikavyy
Publikováno v:
Solid State Phenomena. 314:49-53
The steam oxidation of SiGe shows a transition from Si-like to Ge-like oxidation behavior depending on Ge concentration and oxidation temperature. Ge-like oxidation is described by the generation of oxygen vacancies (VO) at the interface between the
Autor:
Lars-Ake Ragnarsson, Kana Komori, Roger Loo, Thierry Conard, Kurt Wostyn, Dirk Rondas, Jana Loya Prado, Frank Holsteyns, Naoto Horiguchi
Publikováno v:
ECS Transactions. 80:141-146
Autor:
Kurt Wostyn, Frank Holsteyns, Adrian Chasin, Lars-Ake Ragnarsson, Roger Loo, Thierry Conard, Hiroaki Arimura, Dirk Rondas, Naoto Horiguchi
Publikováno v:
ECS Transactions. 93:71-72
Autor:
Roger Loo, Dirk Rondas, Sathish Kumar Dhayalan, Paul Mertens, Harald Benjamin Profijt, Bastien Douhard, Karine Kenis, Frank Holsteyns, Alain Moussa, Kurt Wostyn, Andriy Hikavyy, Stefan De Gendt
Publikováno v:
Solid State Phenomena. 219:20-23
Epitaxial growth requires a clean starting surface for the growth of a high-quality crystalline layer. For epitaxy on Si, an HF-last wet clean followed by an in-situ high-temperature hydrogen bake is the reference pre-epi clean sequence to obtain an
Autor:
Karine Kenis, Sathish Kumar Dhayalan, Frank Holsteyns, Kurt Wostyn, Gavin Simpson, Karthik Swaminathan, Paul Mertens, Gerhard Bast, Dirk Rondas, Stefan De Gendt, Roger Loo, Bastien Douhard, Andriy Hikavyy
Publikováno v:
ECS Transactions. 64:989-995
Inline light scattering measurements are frequently used to determine wafer quality and cleanliness. In this paper we will show how this technique can be extended to determine the crystalline quality after hetero-epitaxy. Misfits on the surface of th
Autor:
Roger Loo, Karine Kenis, Luc Van Autryve, Bastien Douhard, Frank Holsteyns, Dirk Rondas, Paul Mertens, Lucia D'Urzo, Kurt Wostyn, Andriy Hikavyy, Stefan De Gendt
Publikováno v:
ECS Meeting Abstracts. :1825-1825
A H-terminated Si surface serves as the starting surface for hetero-epitaxial growth. The presence of oxygen on the wafer surface caused by surface re-oxidation can significantly reduce the epitaxial quality. In this paper we evaluated the capabiliti