Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Dirk Kaden"'
Autor:
Jingxiang Su, Simon Fichtner, Muhammad Zubair Ghori, Niklas Wolff, Md. Redwanul Islam, Andriy Lotnyk, Dirk Kaden, Florian Niekiel, Lorenz Kienle, Bernhard Wagner, Fabian Lofink
Publikováno v:
Micromachines, Vol 13, Iss 5, p 783 (2022)
In this work, we present a method for growing highly c-axis oriented aluminum scandium nitride (AlScN) thin films on (100) silicon (Si), silicon dioxide (SiO2) and epitaxial polysilicon (poly-Si) substrates using a substrate independent approach. The
Externí odkaz:
https://doaj.org/article/a29618bc8bf540fe8662e1dc9caa2f68
Autor:
Fabian Schwarz, Leon Pohl, Hans-Joachim Quenzer, Ulrich G. Hofmann, Andreas Bahr, Christian Janicke, Felix Heinrich, Thomas von Wantoch, Fabian Lofink, Dirk Kaden, Frank Senger, Jörg Albers, Pauline Malaurie
Publikováno v:
MOEMS and Miniaturized Systems XIX.
Presented here is the world’s first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::441c77746742435573716f0bebdfb12a
https://doi.org/10.1117/12.2546035
https://doi.org/10.1117/12.2546035
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
Based on the discovery of ferroelectric polarization inversion in piezoelectric Al 1.x Sc x N thin films, this paper presents a double layer actuator stack configuration which demonstrates that the inherent advantages of piezoelectric AlN and Al 1-x
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a90d84cafbbe1b94f97cf103741596d0
https://doi.org/10.1109/transducers.2019.8808624
https://doi.org/10.1109/transducers.2019.8808624
MEMS switch with prolonged lifetime under hot switching conditions based on gold as contact material
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
Ohmic MEMS switches can be operated reliable under DC load if important factors determining its reliability are considered as a whole. First of all, these are bi-directional actuation with high forces, a very low contact resistance and good heat diss
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::844c0e7b4173d9240bd7a5ce6ae2c995
https://doi.org/10.1109/transducers.2017.7994474
https://doi.org/10.1109/transducers.2017.7994474
Autor:
C. Eisermann, Shanshan Gu-Stoppel, Fabian Stoppel, Bernhard Wagner, Thorsten Giese, Dirk Kaden
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
In this paper a novel type of piezoelectric MEMS loudspeaker is presented. The device concept is based on concentrically cascaded PZT actuators making it the first two-way MEMS speaker reported. As a further novelty, the device is designed to operate
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c2606979ba70ba28dee339107e843bc
https://doi.org/10.1109/transducers.2017.7994475
https://doi.org/10.1109/transducers.2017.7994475
Autor:
Dirk Kaden, Shanshan Gu-Stoppel, Bernhard Wagner, Ulrich Hofmann, Wolfgang Benecke, Joachim Janes, Hans Joachim Quenzer
Publikováno v:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
This paper presents modeling, fabrication and characterization of two designs of two-axis gimbal-less, thin-film PZT driven micromirrors with 1mm2 apertures. These micromirrors reach high frequencies for piston (21 kHz) and torsional modes (28.9 kHz)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d68c3bd9d150ed3b023f1d84bc97cef8
https://doi.org/10.1109/transducers.2013.6627311
https://doi.org/10.1109/transducers.2013.6627311
Autor:
Wolfgang Benecke, Joachim Janes, Hans Joachim Quenzer, Shanshan Gu-Stoppel, Dirk Kaden, Ulrich Hofmann
Publikováno v:
SPIE Proceedings.
This paper presents design, fabrication and measurements for single-axis piezoelectric MEMS micromirrors with 1 mm2 apertures. These micromirrors, which feature thin-film PZT actuators and mechanical leverage amplification, are dedicated for laser pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b62e8fc59f47c361343988aa9edc21aa
https://doi.org/10.1117/12.2001620
https://doi.org/10.1117/12.2001620
Autor:
Bernd Heinz, Hans-Joachim Quenzer, Lorenzo Castaldi, Dirk Kaden, Robert Mamazza, Bernhard Wagner, Martin Kratzer
Publikováno v:
MRS Proceedings. 1397
In this work high quality ferroelectric PZT films have been prepared in-situ by hot RF magnetron sputtering. 200 mm wafer were coated with PZT films of 1 μm and 2 μm thickness at sputter rates of 45 nm/min in a high volume production sputtering too
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5c24a1788dcdf5a4e476cab9bb7ee1f8
https://doi.org/10.1557/opl.2012.450
https://doi.org/10.1557/opl.2012.450
Autor:
Bernhard Wagner, Lorenzo Castaldi, Martin Kratzer, Hans-Joachim Quenzer, Dirk Kaden, Bernd Heinz, Robert Mamazza
Publikováno v:
2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials.
In the present study, high quality PZT films were deposited by RF magnetron sputtering onto 200mm thermally oxidized silicon substrates at substrate holder temperatures (T h ) between 550°C – 700°C using PbO-enriched single ceramic PZT targets. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::81361edcf09fe3aafcb078240282cd9e
https://doi.org/10.1109/isaf.2011.6013981
https://doi.org/10.1109/isaf.2011.6013981
Autor:
B. Wagner, Martin Kratzer, Hans-Joachim Quenzer, Dirk Kaden, Lorenzo Castaldi, Bernd Heinz, Robert Mamazza
Publikováno v:
2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials.
Ferroelectric PZT thin films have been in-situ deposited on 8-inch wafers by a high volume production sputtering tool. The films were grown on oxidized Si substrates covered either with sputtered Ti/TiO 2 /Pt, sputtered Ti/TiO 2 /Pt/TiO 2 or evaporat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6fd42366d891eb4919f3bd4bd8ecca2d
https://doi.org/10.1109/isaf.2011.6014133
https://doi.org/10.1109/isaf.2011.6014133