Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Dimitris Birmpiliotis"'
Publikováno v:
International Symposium for Testing and Failure Analysis.
The present paper provides an inexpensive method to assess the surface charge density variance directly in capacitive MEMS switches. It was found experimentally that the charge variance decay is directly associated with the presence of ambient humidi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e77e30dc5a5eba3ce62008f2c0b29fcc
https://doi.org/10.31399/asm.cp.istfa2022p0337
https://doi.org/10.31399/asm.cp.istfa2022p0337
Autor:
Dimitris Birmpiliotis, George J. Papaioannou, Matroni Koutsoureli, G. Stavrinidis, George Konstantinidis
Publikováno v:
Journal of Microelectromechanical Systems. 29:202-213
A method that allows the investigation of discharge transport mechanism in dielectric films used in MEMS capacitive switches or MIM capacitors or even bare dielectric films is presented. The method is based on monitoring the dielectric film surface o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2e119f07ae4a9aaec0ad963718482a2f
https://doi.org/10.1109/jmems.2019.2962068
https://doi.org/10.1109/jmems.2019.2962068