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Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask
Publikováno v:
Micro and Nano Engineering, Vol 16, Iss , Pp 100153- (2022)
Platinum (Pt) is widely used in MEMS applications due to its inert nature and high temperature stability. In general, Pt is patterned using dry etching methods which require expensive machinery. In this study, we propose wet etching of Pt electrodes
Externí odkaz:
https://doaj.org/article/e33a990eb94e460b83a7bb25086742de
