Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Dietmar Dr. Keutel"'
Publikováno v:
SPIE Proceedings.
Transmission, absorption and laser induced fluorescence (LIF) measurements were performed to reveal the applicability of different grade CaF 2 for 248 nm laser applications. No emission from self-trapped excitions could be found in LIF measurements a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59f1ab678fa641e3100fc5f48dc32e15
https://doi.org/10.1117/12.752813
https://doi.org/10.1117/12.752813
Publikováno v:
SPIE Proceedings.
Crystalline calcium fluoride is one of the key materials for 193nm lithography and is used for laser optics, beam delivery system optics and stepper/scanner illumination optics. In comparison to fused silica it shows a much higher laser durability. H
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6a62f3ec7b3550c13e498825bee566bc
https://doi.org/10.1117/12.712108
https://doi.org/10.1117/12.712108
Autor:
A. Burkert, Angela Duparré, Lutz Dr. Parthier, Ch. Muehlig, Ute Natura, Wolfgang Triebel, Sven Schroeder, Stefan Gliech, Dietmar Dr. Keutel
Publikováno v:
SPIE Proceedings.
Combined measurements of transmission T , absorption A and total scattering TS revealed the high accuracy of all applied measurement techniques by obtaining a sum T+A+TS+R = (100±0.3)% (R denotes the Fresnel reflection). In order to investigate CaF
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9ff35d1c621e3810f63ae2553c6c9037
https://doi.org/10.1117/12.616904
https://doi.org/10.1117/12.616904