Zobrazeno 1 - 10
of 47
pro vyhledávání: '"Diana Nyyssonen"'
Autor:
Diana Nyyssonen
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography X.
One of the factors that influences the nature of secondary electron imaging and the subsequent metrology of submicron features in a SEM is the system's ability to collect low energy secondary electrons (LES). In a SEM, a bias voltage is applied to th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ad620804caeb75f5d281872b66f43ddb
https://doi.org/10.1117/12.240145
https://doi.org/10.1117/12.240145
Publikováno v:
SPIE Proceedings.
Bright field optical microscopy has well-known nonlinearity problems due to varying film thickness. Phase images eliminate many of these problems. This paper will describe the advantages of phase imaging, based on calculated results. Experimental cor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d2cff13d7474f845cdf7cd2a3d727a6d
https://doi.org/10.1117/12.149020
https://doi.org/10.1117/12.149020
Autor:
Diana Nyyssonen
Publikováno v:
SPIE Proceedings.
In a previous paper, a 2D atomic force probe metrology system was described. The system consists of a 2D atomic force probe used in attractive mode (non-contact) with a laser inter- ferometer system for measuring sample displacement with nanometer se
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ed8ef2b626defe89e33b86cf236d2a81
https://doi.org/10.1117/12.148949
https://doi.org/10.1117/12.148949
Publikováno v:
SPIE Proceedings.
This paper describes a 2-D atomic force microprobe (AFM) system designed specifically for accurate submicron critical dimension (CD) metrology. The system includes 2-D AFM sensing, 3-D position interferometry with 1.25 nm sensitivity, and a special t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8799e332a8490e935512a7d1c7d461b8
https://doi.org/10.1117/12.134902
https://doi.org/10.1117/12.134902
Autor:
Diana Nyyssonen
Publikováno v:
SPIE Proceedings.
Optical linewidth measurements on patterned wafers are complicated by the wide variety of materials and correspondingly wide variation in optical parameters, complex refractive index and thickness, used in the manufacture of integrated circuits. It h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::23775f0a9c3ea24b04bd2360f9718dde
https://doi.org/10.1117/12.933676
https://doi.org/10.1117/12.933676
Autor:
Robert Monteverde, Diana Nyyssonen
Publikováno v:
SPIE Proceedings.
A new Line Width Standard has been developed. It is a physical specimen consisting of calibrated lines and spaces patterned in metal and dielectric layers on a silicon substrate. The standard is for calibration of reflected light measurement systems.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b1168e80b9087d81cf52c62094f41fb6
https://doi.org/10.1117/12.968388
https://doi.org/10.1117/12.968388
Autor:
Russell D. Young, Diana Nyyssonen, Arie W Hartman, William J. Keery, John M. Jerke, Richard E. Swing
Publikováno v:
SPIE Proceedings.
In the current linewidth-measurement program at the National Bureau of Standards, the primary measurement of micrometer-wide lines on black-chromium artifacts is made with an interferometer located in a scanning electron microscope (SEM). The data ou
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::710f334c356db8f91af489e5d4eb9b50
https://doi.org/10.1117/12.955351
https://doi.org/10.1117/12.955351
Autor:
Diana Nyyssonen
Publikováno v:
Optical Engineering. 13
An improved method of measuring spatial coherence is described and some sources of measurement errors are discussed. Partial coherence in the image plane of an optical system is discussed and results of coherence measurements are given that demonstra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff5d6c8f862250efb061413be25e969d
https://doi.org/10.1117/12.7971722
https://doi.org/10.1117/12.7971722
Autor:
Diana Nyyssonen, Chris P. Kirk
Publikováno v:
SPIE Proceedings.
A monochromatic, waveguide model is presented which can predict the optical microscope images of thick-layer objects including multilayer structures with sloping, curved, and undercut edges, granular structures such as polysilicon, and asymmetric obj
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5356922bc9404d48dd43741189c22501
https://doi.org/10.1117/12.947764
https://doi.org/10.1117/12.947764
Autor:
Diana Nyyssonen
Publikováno v:
Optical Engineering. 21
In contrast to earlier work with nearly opaque photomasks, optical linewidth measurements on wafers encompass materials with a much wider variation in optical parameters and material profiles. Accurate optical edge detection requires corrections for
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::98598dab7ffd0df52b9301a682c7dbf5
https://doi.org/10.1117/12.7972998
https://doi.org/10.1117/12.7972998