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pro vyhledávání: '"Diah Rohayani"'
Publikováno v:
Quantum Teknika, Vol 2, Iss 1, Pp 27-31 (2020)
Clean room is a room with the amount of air deposition controlled, classified, designed, constructed and operated by controlling particles in the air. And the parameters that are controlled such as temperature, relative humidity, debit and number of
Externí odkaz:
https://doaj.org/article/4238c51f19454fca871620566a5b076d
