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pro vyhledávání: '"Diélectrique à faible permittivité"'
Autor:
Beaurepaire, Sylvain
Publikováno v:
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2019. Français. ⟨NNT : 2019GREAT085⟩
3D monolithic integration is becoming a new challenge towards developing advanced integrated electronic devices. One of the main key process is to obtain low dielectric constant materials (low-k) able to ensure the classical role of electrical insula
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::3230309f1f830ac291af490b16d9c727
https://theses.hal.science/tel-02634361/file/BEAUREPAIRE_2019_archivage.pdf
https://theses.hal.science/tel-02634361/file/BEAUREPAIRE_2019_archivage.pdf
