Design of ohmic miniature MEMS components for fast reconfiguration

Autor: Verger, Aurélie, Pothier, Arnaud, Guines, Cyril, Crunteanu, Aurelian, Blondy, Pierre, Orlianges, Jean-Christophe, Dhennin, Jérémy, Courtade, Frédéric, Vendier, Olivier

Publikováno v: MEMSWAVE 2011, 12th International Symposium on RF MEMS and RF Microsystems
MEMSWAVE 2011, 12th International Symposium on RF MEMS and RF Microsystems, Jun 2011, Athênes, Greece. pp.Présentation orale

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::1c41344a3c0a05909df4e606886c2a1b
https://hal-unilim.archives-ouvertes.fr/hal-00684094

Miniature RF MEMS switched Capacitors using Nanogaps to achieve 50ns switching Speed Capabilities

Autor: Pothier, Arnaud, Verger, Aurélie, Guines, Cyril, Crunteanu, Aurelian, Blondy, Pierre, Orlianges, Jean-Christophe, Dhennin, Jérémy, Broué, Adrien, Courtade, Frédéric, Vendier, Olivier

Publikováno v: ESA Round Table on Micro and Nano Technology
ESA Round Table on Micro and Nano Technology, Sep 2010, Noordwijk, Netherlands

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::3dccba4ed48c8d8c1ae8eebf3051207b
https://hal-unilim.archives-ouvertes.fr/hal-00933632