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Neon and helium focused ion beam etching of resist patterns

Autor: Xiaoli Zhu, Fouzia Khanom, Doug Runt, Deying Xia

Publikováno v: Nanotechnology. 31(47)

Helium ion microscopy has attracted many applications in imaging, nanofabrication and analysis. One important field of study in nanofabrication using ion beam is the milling or etching of materials using a helium or neon focused ion beam (FIB), with

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d0ee6b46f309ffd88785c7fd94fec2e9
https://pubmed.ncbi.nlm.nih.gov/32886649

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Defect Localization and Electrical Fault Isolation for Metal Connection Using Helium Ion Microscope

Autor: Shawn McVey, Wilhelm Kuehn, Deying Xia

Publikováno v: 2019 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA).

As semiconductor process technology moves further to smaller feature sizes, novel materials and processes are introduced to increase functional device density. [1] It is challenging to have facile approaches to evaluate the new processes for metal co

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::07dccbaf339289a04a10ff7a31f6edd2
https://doi.org/10.1109/vlsi-tsa.2019.8804699

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Defect Localization and Nanofabrication for Conductive Structures with Voltage Contrast in Helium Ion Microscopy

Autor: Shawn McVey, Wilhelm Kuehn, Chuong Huynh, Deying Xia

Publikováno v: ACS applied materialsinterfaces. 11(5)

As the dimensions of feature sizes in electronic devices decrease to nanoscale, an easy method for failure analysis and evaluation of processing steps is required. Gallium-focused ion beam (Ga-FIB) or scanning electron microscope is an efficient appr

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9eb9bd1399a341a127918902498f691f
https://pubmed.ncbi.nlm.nih.gov/30644713

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GaAs milling with neon focused ion beam: Comparison with gallium focused ion beam milling and subsurface damage analysis

Autor: John A. Notte, Ying-Bing Jiang, Deying Xia, Doug Runt

Publikováno v: Applied Surface Science. 538:147922

This study explores the usage of a neon focused ion beam (Ne FIB) as an alternative to the traditional gallium focused ion beam (Ga FIB) for the task of milling into the III-V compound semiconductor material, GaAs. While the Ga FIB is more commonly a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f8c43d4aabf2e092aa6d2432c78ade8a
https://doi.org/10.1016/j.apsusc.2020.147922

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Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope

Autor: Zhishan Yuan, Xinsheng Sean Ling, Chuong Huynh, Deying Xia, Lewis Stern, Aaron Kobler, Shawn McVey

Publikováno v: Nanoscale. 10(11)

The fabrication of solid-state nanopores in an insulating membrane has attracted much attention for biomolecule analysis such as DNA sequencing and detection in recent years. For practical applications and device integration, the challenges include p

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c2d3d389433b021eedbd922663830d37
https://pubmed.ncbi.nlm.nih.gov/29493685

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Applications of Nanomaterials in Nuclear Waste Management

Autor: Yawen Yuan, Shifeng Hou, Hua Wang, Deying Xia

Publikováno v: Multifunctional Nanocomposites for Energy and Environmental Applications ISBN: 9783527342501
Multifunctional Nanocomposites for Energy and Environmental Applications

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a0585ba8befb76c5ff21a83809eb2e91
https://doi.org/10.1002/9783527342501.ch18

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