Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Detlef Pabst"'
Publikováno v:
IEEE Transactions on Automation Science and Engineering. 17:475-489
Machines need to be individually qualified to run lots of certain families in semiconductor wafer fabrication facilities (wafer fabs). A qualification time window that lasts a couple of days is associated with each family and each tool. The time wind
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::15ea0f6b3af02ba74c9a87e5e3acb289
https://doi.org/10.1109/tase.2019.2935469
https://doi.org/10.1109/tase.2019.2935469
Autor:
Gottfried Nieke, Karlheinz Bock, Marcel Stehli, Detlef Pabst, Christian Maleck, Meinhard Schulze
Publikováno v:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In this paper we will present a multi-stage scheduling approach to generate robust schedules for a challenging aspect of semiconductor manufacturing called time-link areas. A time-link is a technologically induced time constraint between one or more
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6fc4a481b76258cd01725346c923aa90
https://doi.org/10.1109/asmc.2019.8791779
https://doi.org/10.1109/asmc.2019.8791779
Publikováno v:
2018 Winter Simulation Conference (WSC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::13cf8ccea03e97656173f53d3a169bce
https://doi.org/10.1109/wsc.2018.8632404
https://doi.org/10.1109/wsc.2018.8632404
Publikováno v:
CASE
In this paper, we discuss requalification strategies for stepper tools in semiconductor wafer fabrication facilities (wafer fabs). Before processing lots on steppers, the steppers have to be qualified. A mathematical programming formulation is used p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d1f9f55051ed08a314d338f012b422b
https://doi.org/10.1109/coase.2018.8560476
https://doi.org/10.1109/coase.2018.8560476
Publikováno v:
2016 Winter Simulation Conference (WSC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5bf2c9894ee8294a3dbd3c7d8793965e
https://doi.org/10.1109/wsc.2016.7822299
https://doi.org/10.1109/wsc.2016.7822299
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 23:168-177
The exponentially weighted moving average (EWMA) filter is commonly used for state estimation of run-to-run controllers in semiconductor manufacturing. It is widely known that, when at steady state, the EWMA filter provides the minimum mean square er
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ab3aad5241b9ae77befe02e12eb94608
https://doi.org/10.1109/tsm.2010.2041270
https://doi.org/10.1109/tsm.2010.2041270
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Chaos theory has been a young research field with successful applications to a variety of areas. Even though former publications have assessed the question if production systems behave chaotic, little work has been published on real life production s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::744b77ec26979356964ca8a0419d34ca
https://doi.org/10.1109/asmc.2015.7164493
https://doi.org/10.1109/asmc.2015.7164493
Publikováno v:
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference.
Diffusion processes in semiconductor fabrication facilities (Fabs) usually refer to the series of processes from wafer cleaning processes to furnace processes. Most furnace tools are batch tools with large batch sizes and have relatively long process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7349f75cec57e084db55cafd390df157
https://doi.org/10.1109/asmc.2013.6552771
https://doi.org/10.1109/asmc.2013.6552771