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pro vyhledávání: '"Deok-Sung Jun"'
Publikováno v:
Materials, Vol 16, Iss 14, p 5112 (2023)
To develop plasma-resistant glass materials suitable for semiconductor etching processes, we introduced alkaline earth oxides (ROs) into a Li2O–Al2O3–SiO2 (LAS) glass. Analysis of glass properties with respect to the additives revealed that among
Externí odkaz:
https://doaj.org/article/4520f6e799664cc28ed7e3b847a32b7d
