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pro vyhledávání: '"Deok-Sung Jun"'
Publikováno v:
Materials, Vol 16, Iss 14, p 5112 (2023)
To develop plasma-resistant glass materials suitable for semiconductor etching processes, we introduced alkaline earth oxides (ROs) into a Li2O–Al2O3–SiO2 (LAS) glass. Analysis of glass properties with respect to the additives revealed that among
Externí odkaz:
https://doaj.org/article/4520f6e799664cc28ed7e3b847a32b7d
Autor:
Kim, So-Won1 (AUTHOR) swkim9193@tukorea.ac.kr, Lee, Hwan-Seok1 (AUTHOR) jds2697@tukorea.ac.kr, Jun, Deok-Sung1 (AUTHOR) selee@tukorea.ac.kr, Lee, Seong-Eui1 (AUTHOR), Lee, Joung-Ho2 (AUTHOR), Lee, Hee-Chul1 (AUTHOR) eechul@tukorea.ac.kr
Publikováno v:
Materials (1996-1944). Jul2023, Vol. 16 Issue 14, p5112. 12p.