Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Dennis Engel"'
Autor:
Denis Eremin, Dennis Engel, Dennis Krüger, Sebastian Wilczek, Birk Berger, Moritz Oberberg, Christian Wölfel, Andrei Smolyakov, Jan Lunze, Peter Awakowicz, Julian Schulze, Ralf Peter Brinkmann
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas at low pressure are investigated. The device in focus is a geometrically asymmetric cylindrical magnetron
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::97b6d888fb29e5f4e890144ee5f1d866
http://arxiv.org/abs/2211.04805
http://arxiv.org/abs/2211.04805
Autor:
Ralf Peter Brinkmann, Birk Berger, Jan Lunze, Peter Awakowicz, Dennis Engel, Julian Schulze, Christian Woelfel, Moritz Oberberg
Publikováno v:
IFAC Journal of Systems and Control. 16:100142
The modeling and control of reactive sputtering processes to deposit aluminum oxide thin films by an RF driven magnetically-enhanced low-pressure plasma is investigated. The new model describes the nonlinear deposition process with respect to the rea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f798a161377793400f2992bfd84faf5
https://doi.org/10.1016/j.ifacsc.2021.100142
https://doi.org/10.1016/j.ifacsc.2021.100142
Autor:
Ralf Peter Brinkmann, Jan Lunze, Julian Schulze, Peter Awakowicz, Birk Berger, M Buschheuer, Moritz Oberberg, C Wölfel, Denis Eremin, Dennis Engel
Publikováno v:
Plasma Sources Science and Technology. 29:075013
Previous studies in low pressure magnetized capacitively coupled radio frequency (RF) plasmas operated in argon with optimized geometric reactor symmetry have shown that the magnetic asymmetry effect (MAE) allows to control the particle flux energy d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a1336d810e4538f7594dfed83aa082c1
https://doi.org/10.1088/1361-6595/ab9b31
https://doi.org/10.1088/1361-6595/ab9b31
Autor:
Moritz Oberberg, Birk Berger, Dennis Engel, Jan Lunze, Julian Schulze, Ralf Peter Brinkmann, Peter Awakowicz, Christian Woelfel
Publikováno v:
Journal of Instrumentation. 14:P10007-P10007
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0622877557640149eb084b12a3936ca1
https://doi.org/10.1088/1748-0221/14/10/p10007
https://doi.org/10.1088/1748-0221/14/10/p10007
Publikováno v:
Plasma Sources Science and Technology. 28:015003
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c289665c0306c45cfae5b93692232658
https://doi.org/10.1088/1361-6595/aaf7f6
https://doi.org/10.1088/1361-6595/aaf7f6
Autor:
Dennis, Engel
Publikováno v:
The Journal of the Michigan Dental Association. 95(7)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::4e840b8149c71d42dd42f46f73c18a9c
https://pubmed.ncbi.nlm.nih.gov/23980399
https://pubmed.ncbi.nlm.nih.gov/23980399
Autor:
Dennis, Engel
Publikováno v:
The Journal of the Michigan Dental Association. 95(4)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::b3ad06c84f81a21186e47327dce74f51
https://pubmed.ncbi.nlm.nih.gov/23741954
https://pubmed.ncbi.nlm.nih.gov/23741954
Autor:
Dennis, Engel
Publikováno v:
The Journal of the Michigan Dental Association. 94(9)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::046274c592fdc1f4aac453eb22b6a16c
https://pubmed.ncbi.nlm.nih.gov/23029805
https://pubmed.ncbi.nlm.nih.gov/23029805
Autor:
Dennis, Engel
Publikováno v:
The Journal of the Michigan Dental Association. 94(2)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::0662cc6fa69a1bf84d926d23d4fc8312
https://pubmed.ncbi.nlm.nih.gov/22720495
https://pubmed.ncbi.nlm.nih.gov/22720495
Autor:
Dennis, Engel
Publikováno v:
The Journal of the Michigan Dental Association. 93(10)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::7be3af8b925269c5aaa99cf392f9649a
https://pubmed.ncbi.nlm.nih.gov/22073716
https://pubmed.ncbi.nlm.nih.gov/22073716