Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Denise Pinon"'
Autor:
Behnam Kheyraddini Mousavi, Adeeko Benga, Arash Kheyraddini Mousavi, Edidson Lima, Stephen Moya, Joseph D. Butner, Khawar Abbas, Denise Pinon, Zayd C. Leseman, Mirza Elahi
Publikováno v:
Vacuum. 109:216-222
Rekindled interest has developed in pulsed vacuum systems due to their use for Xenon Difluoride (XeF2) etching systems and their usefulness in the fabrication of MEMS and nanostructures. Despite numerous applications of pulsed vacuum systems, little
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0ac1f14de56bf5a9355ede6da8166f8c
https://doi.org/10.1016/j.vacuum.2014.07.028
https://doi.org/10.1016/j.vacuum.2014.07.028
Autor:
Tyler J. Hieber, Mohammadhosein Ghasemi Baboly, Denise Pinon, T L Ward, Zayd C. Leseman, Dipta Sarkar, Austin Schuberth, Joseph D. Butner, Khawar Abbas, Mirza Elahi
Publikováno v:
Journal of Micromechanics and Microengineering. 28:045007
A technique is presented for determination of the depletion of the etchant, etched depth, and instantaneous etch rate for Si etching with XeF2 in a pulsed etching system in real time. The only experimental data required is the pressure data collected
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::40d20938d24ff719d771763dcc1c0957
https://doi.org/10.1088/1361-6439/aaa74e
https://doi.org/10.1088/1361-6439/aaa74e