Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Denise C. Souza"'
Autor:
Henrique E. M. Peres, Michel O. S. Dantas, Elisabete Galeazzo, Alejandro A. Zuniga-Paez, Maycon M. Kopelvski, Wellington A. A. Silva, Denise C. Souza
Publikováno v:
2019 34th Symposium on Microelectronics Technology and Devices (SBMicro).
Zinc oxide (ZnO) has attracted considerable interest for a wide range of applications, including its use as an active layer in gas sensor devices and as promising emitters for field emission devices. This paper explores ZnO nanowires growth through t
Autor:
Bruno A. Nobaro, Takuya Niwa, Denise C. Souza, Alejandro Zuñiga, Inés Pereyra, K. F. Albertin
Publikováno v:
ECS Transactions. 31:349-358
A set of TiOxNy films was deposited by reactive RF magnetron sputtering varying the nitrogen partial pressure in a Ar/N2 gaseous mixture. Utilizing these films as gate dielectric layer MOS capacitors were fabricated and characterized. The TiOxNy film