Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Denis Veselov"'
Publikováno v:
Materials Science Forum. 977:238-243
This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration
Publikováno v:
Materials Science Forum. 977:190-194
Modern methods of recycling spent automotive catalysts and their main disadvantages in industrial practice are considered. The electrochlorination method is proposed as the basis of the platinum-group metals extraction technology after electric arc m
Autor:
Andrey Antonov, Andreas Tietz, Nikolay Samotaev, Denis Veselov, Andrey Kirichenko, Grigory Tsarev
Publikováno v:
Materials Science Forum. 977:218-222
The team of authors described a solution to the problem of developing a fundamentally new technology for the industrial processing of spent diesel automotive catalysts containing platinum group metals (PGM) and SiC carrier, which has such advantages
Autor:
Nikolay Samotaev, Denis Veselov, Maya Etrekova, Anastasia Ivanova, Konstantin Oblov, Artur Litvinov
Publikováno v:
Materials Science Forum. 977:256-260
This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for suste
Autor:
Nazar Zibilyuk, Konstantin Oblov, Denis Veselov, Maya Etrekova, B. Podlepetsky, N. V. Volkov, Nikolay Samotaev
Publikováno v:
Materials Science Forum. 977:231-237
This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it
Autor:
Anastasiya Gorshkova, Konstantin Oblov, Maya Etrekova, Nikolay Samotaev, Anastasia Ivanova, Denis Veselov
Publikováno v:
Materials Science Forum. 977:272-276
This article presents the technological aspects of experiments on the stable topological patterns formation from thin films of platinum on ceramic membranes. Platinum thin films were deposited by magnetron sputtering on a clean or pre-activated laser
Autor:
Yu.A. Voronov, Denis Veselov
Publikováno v:
Physics of Atomic Nuclei. 79:1678-1681
The mean range and its standard deviation are calculated for boron ions implanted into silicon with energies below 10 keV. Similar characteristics are calculated for indium ions with energies below 200 keV. The obtained results are presented in tabul
Autor:
Denis Veselov
Publikováno v:
Applied Mechanics and Materials. :994-997
The article presents the properties study results of the dielectric membranes for sensitive elements of semiconductor gas sensors, obtained by different modes of the reactive magnetron sputtering of silicon with application of the two-stage unilatera
Publikováno v:
IOP Conference Series: Materials Science and Engineering. 475:012005
Publikováno v:
Journal of Physics: Conference Series. 748:012017
The paper is devoted to the study of deep reactive ion etching of silicon using diode plasma etcher system with a low-power source. Silicon wafers were etched in a sulfur hexafluoride plasma and sulfur hexafluoride/oxygen plasma. The maximum achieved