Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Denis Tanon-Pellissier"'
Autor:
Damien Jeanjean, Guillaume Briend, Philippe Garnier, Didier Lévy, Denis Tanon-Pellissier, Olivier Gourhant, G. Bidal, Didier Dutartre, Nicolas Breil, Yves Campidelli
Publikováno v:
ECS Transactions. 41:179-186
In this article, focus has been made on two topics: the SiGe sensitivity to wet Front-End-Of-Line (FEOL) surface preparations and the SiGe/Oxide interface. Depending on the FEOL cleaning process, the chemical oxide growth on SiGe and the associated c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a0757f887e0feeac509d4ca85360fe41
https://doi.org/10.1149/1.3630842
https://doi.org/10.1149/1.3630842
Autor:
Guillaume Briend, Philippe Garnier, Damien Jeanjean, Denis Tanon-Pellissier, Yves Campidelli, Nicolas Breil, Olivier Gourhant, Gregory Bidal, Didier Levy
Publikováno v:
ECS Meeting Abstracts. :2064-2064
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b8c160e80b0b018fa0c9105fb42d446
https://doi.org/10.1149/ma2011-02/30/2064
https://doi.org/10.1149/ma2011-02/30/2064