Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Deng Guogui"'
Publikováno v:
2020 China Semiconductor Technology International Conference (CSTIC).
Hole layer mask with small corner-to-corner space is usually been limited by mask rule check in OPC. For 28nm and below node, via or contact layer square pattern edges need not fragmentation in general. This paper investigates fragmentations of hole
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7d4b90c65f9d5aa834be1cfe5e414e48
https://doi.org/10.1109/cstic49141.2020.9282444
https://doi.org/10.1109/cstic49141.2020.9282444
Publikováno v:
2016 China Semiconductor Technology International Conference (CSTIC); 2016, p1-5, 5p
Autor:
Cain, Jason P., Yuan, Chi-Min, Zhang, Meili, Deng, Guogui, Wang, Mudan, Yu, Shirui, Hu, Xinyi, Du, Chunshan, Wan, Qijian, Liu, Zhengfang, Gao, Gensheng, Kabeel, Aliaa, Madkour, Kareem, ElManhawy, Wael, Kwan, Joe
Publikováno v:
Proceedings of SPIE; March 2018, Vol. 10588 Issue: 1 p105880U-105880U-7, 952928p
Autor:
Sanchez, Martha I., Ukraintsev, Vladimir A., Deng, Guogui, Hao, Jingan, Xiao, Lihong, Xing, Bin, Jiang, Yuntao, He, Kaiting, Zhang, Qiang, He, Weiming, Liu, Chang, Lin, Yi-Shih, Wu, Qiang, Shi, Xuelong
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782C-97782C-13, 9680432p
Autor:
Cain, Jason P., Sanchez, Martha I., Deng, Guogui, Hao, Jingan, Xing, Bin, Jiang, Yuntao, Li, Gaorong, Zhang, Qiang, Yue, Liwan, Zu, Yanlei, Hu, Huayong, Liu, Chang, Shen, Manhua, Zhang, Shijian, He, Weiming, Zhang, Nannan, Lin, Yi-Shih, Wu, Qiang, Shi, Xuelong
Publikováno v:
Proceedings of SPIE; March 2015, Vol. 9424 Issue: 1 p94242I-94242I-8, 848187p
Autor:
Lai, Kafai, Erdmann, Andreas, Deng, Guogui, Hao, Jingan, Cai, Boxiu, Xing, Bin, Yao, Xin, Zhang, Qiang, Li, Tianhui, Lin, Yi-Shih, Wu, Qiang, Shi, Xuelong
Publikováno v:
Proceedings of SPIE; April 2014, Vol. 9052 Issue: 1 p905229-905229-10
Publikováno v:
ECS Transactions; February 2014, Vol. 60 Issue: 1
Autor:
Deng, Guogui, Hao, Jingan, Cai, Bo-Xiu, Xing, Bin, Yao, Xin, Zhang, Qiang, Li, Gaorong, Lin, Yi-Shih, Wu, Qiang, Shi, Xuelong
Publikováno v:
ECS Transactions; February 2014, Vol. 60 Issue: 1
Publikováno v:
ECS Transactions; February 2014, Vol. 60 Issue: 1
Publikováno v:
ECS Transactions; March 2013, Vol. 52 Issue: 1