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Autor:
Demirci, Kemal Safak
The main topic of this thesis is the development of a chemical microsystem based on integration of a silicon-based resonant microsensor and a CMOS ASIC for portable sensing applications. Cantilever and disk-shape microresonators have been used as mas
Externí odkaz:
http://hdl.handle.net/1853/41182
Publikováno v:
Journal of Applied Physics; Jul2008, Vol. 104 Issue 1, p014911, 9p, 6 Diagrams, 1 Chart, 6 Graphs
