Zobrazeno 1 - 10
of 189
pro vyhledávání: '"Demetre J Economou"'
Publikováno v:
Journal of Vacuum Science & Technology B. 40:022206
A new method for absolute measurement of the vacuum ultraviolet (VUV) photon flux at the edge of a plasma is described. The light produced by the plasma was allowed to strike a negatively biased, gold-coated copper substrate remote from the plasma. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9904f6e980a911f875d1c84461c6a4a3
https://doi.org/10.1116/6.0001709
https://doi.org/10.1116/6.0001709
Publikováno v:
Journal of Vacuum Science & Technology B. 40:022207
Photo-assisted etching of p-type Si was previously found to occur in a chlorine-containing, Faraday-shielded, inductively coupled plasma (ICP), and this was attributed to the vacuum ultraviolet (VUV) light generated by the plasma. Other causes for th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2b6e9c9679d61502af4cd10dcf4f08fa
https://doi.org/10.1116/6.0001710
https://doi.org/10.1116/6.0001710
Publikováno v:
Plasma Science and Technology. 23:115404
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c161a4175b0f61495b95801268494900
https://doi.org/10.1088/2058-6272/ac1cce
https://doi.org/10.1088/2058-6272/ac1cce
Publikováno v:
Physical Review Letters. 122
We report the first experimental observation of nonlinear standing waves excited by plasma-series-resonance-enhanced harmonics in low pressure, very high frequency, parallel plate, capacitively coupled plasmas. Spatial structures of the harmonics of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a7ac8df27174f72907c784053aa8f70f
https://doi.org/10.1103/physrevlett.122.185002
https://doi.org/10.1103/physrevlett.122.185002
Publikováno v:
Journal of Physics D: Applied Physics. 54:075205
A two-dimensional (r, z) numerical simulation of the discharge characteristics of an atmospheric pressure plasma jet (APPJ), with coaxial shielding gas, was performed. The helium working gas flowed in a central capillary tube, engulfing a needle elec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9bc5ae296ba16d47b34656c16f704216
https://doi.org/10.1088/1361-6463/abc2f1
https://doi.org/10.1088/1361-6463/abc2f1
Publikováno v:
Journal of Applied Physics. 128:093301
Atmospheric pressure surface dielectric barrier discharges (SDBDs) may be composed of streamers fast propagating along a dielectric surface in ambient air, producing reactive oxygen and nitrogen species, and inducing a force on the neutral gas, which
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9b6e9649b6d7ee4b26917523592becdd
https://doi.org/10.1063/5.0013594
https://doi.org/10.1063/5.0013594
Publikováno v:
Journal of Vacuum Science & Technology A. 38:023009
Etching of p-Si in 60 mTorr 10%Cl2/90%Ar Faraday-shielded inductively coupled high density plasmas was investigated under both ion-assisted etching (IAE) and photoassisted etching (PAE) conditions. Real-time etching rates and after-etching Si surface
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::57f8f0334cea0c4e81caeebb9c3fd9d5
https://doi.org/10.1116/1.5138189
https://doi.org/10.1116/1.5138189
Publikováno v:
The Review of scientific instruments. 89(10)
Accurate magnetic measurements in radio frequency capacitively coupled plasmas (CCP) are challenging due to the presence of inherently strong electric fields and relatively weak magnetic fields. In this work, a new B-dot probe circuit is presented, c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::75557351e2b37146eaa7a488a56515bb
https://pubmed.ncbi.nlm.nih.gov/30399790
https://pubmed.ncbi.nlm.nih.gov/30399790
Publikováno v:
Journal of Research of the National Institute of Standards and Technology
Over the past few years multidimensional self-consistent plasma simulations including complex chemistry have been developed which are promising tools for furthering our understanding of reactive gas plasmas and for reactor design and optimization. Th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3360c3cccb22c76e7506267db79b9e1a
https://pubmed.ncbi.nlm.nih.gov/29151756
https://pubmed.ncbi.nlm.nih.gov/29151756
Autor:
Siyuan Tian, Paul Ruchhoeft, Ya-Ming Chen, Demetre J. Economou, Vincent M. Donnelly, Ryan Sawadichai
Publikováno v:
Journal of Physics D: Applied Physics. 52:355205
A nearly monoenergetic Ar+ ion beam (100 eV peak energy, 3.5 eV full width at half maximum), with self-neutralized space charge, was extracted from a power modulated (pulsed) inductively coupled plasma (ICP), through a single grounded grid. The beam
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b4dd3495026b841262e43040d2f7ac0
https://doi.org/10.1088/1361-6463/ab294e
https://doi.org/10.1088/1361-6463/ab294e