Micromachined fountain pen for SPM-based surface modification

Autor: Deladi, S., Tas, N. R., Erwin J.W. Berenschot, Krijnen, Gijs J. M., Boer, M. J., Boer, J. H., Elwenspoek, M. C.

Publikováno v: MESA+ Day 2004
University of Twente Research Information (Pure Portal)

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::805b45386d67b5bd3d5578d27bbec548
https://research.utwente.nl/en/publications/645f4516-f211-40bc-8323-fec4b07fb4cd

Flash release - an alternative for releasing complex MEMS devices

Autor: Deladi, S., Krijnen, G.J.M., Elwenspoek, M.C., Svetovoy, V., Courtois, Bernard, Esashi, Masayoshi, Ionescu, Adrian, Karam, Jean Michel, Korvink, Jan, Markus, Karen

Publikováno v: Design, Test, Integration and Packaging of MEMS/MOEMS 2004: 12-14 May 2004, Cannes, France, 343-348
STARTPAGE=343;ENDPAGE=348;TITLE=Design, Test, Integration and Packaging of MEMS/MOEMS 2004

A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::f3b86e1d166d126544160f935b8e07fe
https://research.utwente.nl/en/publications/afd53f46-ca56-45f4-9621-56971bb340e0

FEM assisted design and simulation of novel electrothermal actuators

Autor: Deladi, S., Krijnen, G., Elwenspoek, M., Laudon, Matthew, Romanowicz, Bart

Publikováno v: Nanotech 2003: 2003 Nanotechnology Conference and Trade Show, February 23-27, 2003, San Francisco, California, USA, 1, 400-403

In this work the authors present the design, simulation, and experimental results of novel electrothermal actuators, such as the trimorph actuator for out-of-plane motion, the coupled in-plane actuator for in-plane motion and an actuator providing co

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::8dfaad54e49e03e18ae07fdbfd5162d4
https://research.utwente.nl/en/publications/a142f6a0-d5ae-4e0c-a7b0-d33f803bb1df

Zoom camera based on liquid lenses.

Autor: Kuiper, S., Hendriks, B. H. W., Suijver, J. F., Deladi, S., Helwegen, I.

Publikováno v: Proceedings of SPIE; Nov2007, Issue 1, p64660F-64660F-7, 7p

Parallel-beams/lever electrothermal out-of-plane actuator.

Autor: Deladi, S., Krijnen, G., Elwenspoek, M.C.

Publikováno v: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS 2003; 2003, p103-107, 5p