The Consequences of Random Sequential Adsorption for the Precursor Packing and Growth-Per-Cycle of Atomic Layer Deposition Processes.

Autor: Tezsevin I; Department of Applied Physics and Science Education, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands., Deijkers JH; Department of Applied Physics and Science Education, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands., Merkx MJM; Department of Applied Physics and Science Education, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands., Kessels WMM; Department of Applied Physics and Science Education, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands., Sandoval TE; Department of Chemical and Environmental Engineering, Universidad Técnica Federico Santa María, 2340000 Santiago, Chile., Mackus AJM; Department of Applied Physics and Science Education, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.

Publikováno v: The journal of physical chemistry letters [J Phys Chem Lett] 2024 Jul 25; Vol. 15 (29), pp. 7496-7501. Date of Electronic Publication: 2024 Jul 16.